Ion microscopy

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GOLD BOOK DEFINITION
Ion microscopy

http://goldbook.iupac.org/I03221.html

Use of the secondary ion mass spectrometry (SIMS) technique to obtain micrographs of the elemental (or isotopic) distribution at the surface of a sample with a spatial resolution of 2 µm or better.

Source:

Orange Book, p. 249

IUPAC Gold Book

See also