Residual gas analyzer

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Residual gas analyzer
Mass spectrometer used to measure the composition and pressure of gases in an evacuated chamber and to test for leaks in pressurized systems.
Related Term(s):

J. F. O'Hanlon. A User's Guide to Vacuum Technology, John Wiley, New York (2003).

From Definitions of Terms Relating to Mass Spectrometry (IUPAC Recommendations 2013); DOI: 10.1351/PAC-REC-06-04-06 © IUPAC 2013.

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