Residual gas analyzer

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IUPAC RECOMMENDATIONS 2013
Residual gas analyzer
Mass spectrometer used to measure the composition and pressure of gases in an evacuated chamber and to test for leaks in pressurized systems.
Related Term(s):
Reference(s):

J. F. O'Hanlon. A User's Guide to Vacuum Technology, John Wiley, New York (2003).

From Definitions of Terms Relating to Mass Spectrometry (IUPAC Recommendations 2013); DOI: 10.1351/PAC-REC-06-04-06 © IUPAC 2013.

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