Residual gas analyzer
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|IUPAC RECOMMENDATIONS 2013|
|Residual gas analyzer|
|Mass spectrometer used to measure the composition and pressure of gases in an evacuated chamber and to test for leaks in pressurized systems.|
J. F. O'Hanlon. A User's Guide to Vacuum Technology, John Wiley, New York (2003).
|From Definitions of Terms Relating to Mass Spectrometry (IUPAC Recommendations 2013); DOI: 10.1351/PAC-REC-06-04-06 © IUPAC 2013.|