Secondary ion mass spectrometry

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K. K. Murray, R. K. Boyd, M. N. Eberlin, G. J. Langley, L. Li and Y. Naito, Pure Appl. Chem., 2013, 85, 1515-1609, 10.1351/PAC-REC-06-04-06.

Secondary ion mass spectrometry
Technique in which a focused beam of primary ions produces secondary ions by sputtering from a solid surface. The secondary ions are analyzed by mass spectrometry.
Related Term(s): dynamic secondary ion mass spectrometry (DSIMS)

A. Benninghoven, B. Hagenhoff, E. Niehuis. Anal. Chem. 65, 630A (1993).

Definitions of Terms Relating to Mass Spectrometry (IUPAC Recommendations 2013); DOI: 10.1351/PAC-REC-06-04-06 © IUPAC 2013.

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