Secondary ion mass spectrometry
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|IUPAC RECOMMENDATIONS 2013|
|Secondary ion mass spectrometry|
|Technique in which a focused beam of primary ions produces secondary ions by sputtering from a solid surface. The secondary ions are analyzed by mass spectrometry.|
|Related Term(s): dynamic secondary ion mass spectrometry (DSIMS)|
A. Benninghoven, B. Hagenhoff, E. Niehuis. Anal. Chem. 65, 630A (1993).
|From Definitions of Terms Relating to Mass Spectrometry (IUPAC Recommendations 2013); DOI: 10.1351/PAC-REC-06-04-06 © IUPAC 2013.|