Secondary ion mass spectrometry
From Mass Spectrometry Terms
| IUPAC RECOMMENDATIONS 2013
K. K. Murray, R. K. Boyd, M. N. Eberlin, G. J. Langley, L. Li and Y. Naito, Pure Appl. Chem., 2013, 85, 1515-1609.
|Secondary ion mass spectrometry|
|Technique in which a focused beam of primary ions produces secondary ions by sputtering from a solid surface. The secondary ions are analyzed by mass spectrometry.|
|Related Term(s): dynamic secondary ion mass spectrometry (DSIMS)|
A. Benninghoven, B. Hagenhoff, E. Niehuis. Anal. Chem. 65, 630A (1993).
|Definitions of Terms Relating to Mass Spectrometry (IUPAC Recommendations 2013); DOI: 10.1351/PAC-REC-06-04-06 © IUPAC 2013.|